JPS6413132U - - Google Patents
Info
- Publication number
- JPS6413132U JPS6413132U JP10795087U JP10795087U JPS6413132U JP S6413132 U JPS6413132 U JP S6413132U JP 10795087 U JP10795087 U JP 10795087U JP 10795087 U JP10795087 U JP 10795087U JP S6413132 U JPS6413132 U JP S6413132U
- Authority
- JP
- Japan
- Prior art keywords
- suction
- pipes
- stage
- groups
- similar loops
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001179 sorption measurement Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Jigs For Machine Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10795087U JPS6413132U (en]) | 1987-07-13 | 1987-07-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10795087U JPS6413132U (en]) | 1987-07-13 | 1987-07-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6413132U true JPS6413132U (en]) | 1989-01-24 |
Family
ID=31342828
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10795087U Pending JPS6413132U (en]) | 1987-07-13 | 1987-07-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6413132U (en]) |
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1987
- 1987-07-13 JP JP10795087U patent/JPS6413132U/ja active Pending